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American Institute of Aeronautics and Astronautics

    Course Outline

    Sensor Systems and Microsystems: From Fabrication to Application



    Course Outline:

    I. Micro/Nanofabrication techniques
    A. Oxidation and Diffusion of Silicon
    B. Lithography and Resolution Limits
    C. Nucleation and Growth and Physical Vapor Deposition
    D. Chemical Vapor Deposition and Atomic Layer Deposition
    E. Plasma Etching
    F. Focused Ion Beam Processing
    G. Electroplating of Micro/Nanodevices
    H. Wafer Bonding and Integrated Packaging technology


    II. Case Studies and Lessons Learned In Sensor Development
    A. Sensors And Supporting Hardware Need To Be Tailored for the Application
    B. The Importance of Surface Interface Control
    C. Microfabrication is not Just Making Something Smaller
    D. The Need For Sensor Arrays
    E. Supporting Technologies Often Determine Success in a Sensor Application
    F. Sensor Technology Application Approaches

    III. Aerospace Sensor System Application
    A. Space Flight Hardware Processes
    1. Payload Requirements
    2. Launch Vehicle Requirements
    B. Design Challenges for Space Flight
    C. Case Study of Mars Pathfinder Dust Sensor Development
    D. Case Study of Ares 1 Development Flight Instrumentation Selection
    E. Case Study of Ares 1 Thrust Vector Control Instrumentation Selection
    F. Future of Sensors in Space Flight

    IV. Future Directions in Sensor Technology
    A. Smart Sensors Systems
    B. Expanding Operational Ranges into Harsh Environments
    C. Integrated Sensor/Actuator Systems
    D. Nanotechnology